Simple Technique for Examination of Sputtering Patterns

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Bibliographic Details
Published in:Review of scientific instruments 1964-01, Vol.35 (1), p.123-124
Main Authors: Nielsen, Ronald E., Shepherd, William B.
Format: Article
Language:English
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ISSN:0034-6748
1089-7623
DOI:10.1063/1.1718688