Simple Technique for Examination of Sputtering Patterns

Saved in:
Bibliographic Details
Published in:Review of scientific instruments 1964-01, Vol.35 (1), p.123-124
Main Authors: Nielsen, Ronald E., Shepherd, William B.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
cited_by cdi_FETCH-LOGICAL-c299t-b09ba4f9a7e74be5206bf79a14d268715c2f7bc699d62609a9600cc0db2ee4023
cites cdi_FETCH-LOGICAL-c299t-b09ba4f9a7e74be5206bf79a14d268715c2f7bc699d62609a9600cc0db2ee4023
container_end_page 124
container_issue 1
container_start_page 123
container_title Review of scientific instruments
container_volume 35
creator Nielsen, Ronald E.
Shepherd, William B.
description
doi_str_mv 10.1063/1.1718688
format article
fullrecord <record><control><sourceid>scitation_cross</sourceid><recordid>TN_cdi_crossref_primary_10_1063_1_1718688</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>rsi</sourcerecordid><originalsourceid>FETCH-LOGICAL-c299t-b09ba4f9a7e74be5206bf79a14d268715c2f7bc699d62609a9600cc0db2ee4023</originalsourceid><addsrcrecordid>eNqdj0tLAzEcxIMouFYPfoNcFbb-k83mcZRSH1BQaD2HJJtopPsw2Yp-e1tb8O5cZg4_hhmELglMCfDqhkyJIJJLeYQKAlKVgtPqGBUAFSu5YPIUneX8DlvVhBRILGM7rD1eeffWxY-Nx6FPeP5l2tiZMfYd7gNeDptx9Cl2r_jZ7FKXz9FJMOvsLw4-QS9389XsoVw83T_Obhelo0qNpQVlDQvKCC-Y9TUFboNQhrCGcilI7WgQ1nGlGk45KKM4gHPQWOo9A1pN0NW-16U-5-SDHlJsTfrWBPTusSb68HjLXu_Z7OL4O_5_8Gef_kA9NKH6AVBTZEA</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Simple Technique for Examination of Sputtering Patterns</title><source>AIP Digital Archive</source><source>AIP Journals (American Institute of Physics)</source><creator>Nielsen, Ronald E. ; Shepherd, William B.</creator><creatorcontrib>Nielsen, Ronald E. ; Shepherd, William B.</creatorcontrib><identifier>ISSN: 0034-6748</identifier><identifier>EISSN: 1089-7623</identifier><identifier>DOI: 10.1063/1.1718688</identifier><identifier>CODEN: RSINAK</identifier><language>eng</language><ispartof>Review of scientific instruments, 1964-01, Vol.35 (1), p.123-124</ispartof><rights>The American Institute of Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c299t-b09ba4f9a7e74be5206bf79a14d268715c2f7bc699d62609a9600cc0db2ee4023</citedby><cites>FETCH-LOGICAL-c299t-b09ba4f9a7e74be5206bf79a14d268715c2f7bc699d62609a9600cc0db2ee4023</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/rsi/article-lookup/doi/10.1063/1.1718688$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>314,780,782,784,795,1559,27924,27925,76383,76390</link.rule.ids></links><search><creatorcontrib>Nielsen, Ronald E.</creatorcontrib><creatorcontrib>Shepherd, William B.</creatorcontrib><title>Simple Technique for Examination of Sputtering Patterns</title><title>Review of scientific instruments</title><issn>0034-6748</issn><issn>1089-7623</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1964</creationdate><recordtype>article</recordtype><recordid>eNqdj0tLAzEcxIMouFYPfoNcFbb-k83mcZRSH1BQaD2HJJtopPsw2Yp-e1tb8O5cZg4_hhmELglMCfDqhkyJIJJLeYQKAlKVgtPqGBUAFSu5YPIUneX8DlvVhBRILGM7rD1eeffWxY-Nx6FPeP5l2tiZMfYd7gNeDptx9Cl2r_jZ7FKXz9FJMOvsLw4-QS9389XsoVw83T_Obhelo0qNpQVlDQvKCC-Y9TUFboNQhrCGcilI7WgQ1nGlGk45KKM4gHPQWOo9A1pN0NW-16U-5-SDHlJsTfrWBPTusSb68HjLXu_Z7OL4O_5_8Gef_kA9NKH6AVBTZEA</recordid><startdate>196401</startdate><enddate>196401</enddate><creator>Nielsen, Ronald E.</creator><creator>Shepherd, William B.</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>196401</creationdate><title>Simple Technique for Examination of Sputtering Patterns</title><author>Nielsen, Ronald E. ; Shepherd, William B.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c299t-b09ba4f9a7e74be5206bf79a14d268715c2f7bc699d62609a9600cc0db2ee4023</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1964</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Nielsen, Ronald E.</creatorcontrib><creatorcontrib>Shepherd, William B.</creatorcontrib><collection>CrossRef</collection><jtitle>Review of scientific instruments</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Nielsen, Ronald E.</au><au>Shepherd, William B.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Simple Technique for Examination of Sputtering Patterns</atitle><jtitle>Review of scientific instruments</jtitle><date>1964-01</date><risdate>1964</risdate><volume>35</volume><issue>1</issue><spage>123</spage><epage>124</epage><pages>123-124</pages><issn>0034-6748</issn><eissn>1089-7623</eissn><coden>RSINAK</coden><doi>10.1063/1.1718688</doi><tpages>2</tpages></addata></record>
fulltext fulltext
identifier ISSN: 0034-6748
ispartof Review of scientific instruments, 1964-01, Vol.35 (1), p.123-124
issn 0034-6748
1089-7623
language eng
recordid cdi_crossref_primary_10_1063_1_1718688
source AIP Digital Archive; AIP Journals (American Institute of Physics)
title Simple Technique for Examination of Sputtering Patterns
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-27T21%3A41%3A12IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-scitation_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Simple%20Technique%20for%20Examination%20of%20Sputtering%20Patterns&rft.jtitle=Review%20of%20scientific%20instruments&rft.au=Nielsen,%20Ronald%20E.&rft.date=1964-01&rft.volume=35&rft.issue=1&rft.spage=123&rft.epage=124&rft.pages=123-124&rft.issn=0034-6748&rft.eissn=1089-7623&rft.coden=RSINAK&rft_id=info:doi/10.1063/1.1718688&rft_dat=%3Cscitation_cross%3Ersi%3C/scitation_cross%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c299t-b09ba4f9a7e74be5206bf79a14d268715c2f7bc699d62609a9600cc0db2ee4023%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true