Angular-Dependent Sputtering of Copper Single Crystals

The dependence of the sputtering yield upon the angle of incidence for copper single crystals by bombardment with 20-keV Ne+, Ar+, and Kr+ ions has been measured. The maxima and minima in this dependence, which have been found, can be correlated to a transparency in different directions of the first...

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Bibliographic Details
Published in:Journal of applied physics 1963-03, Vol.34 (3), p.690-691
Main Authors: Fluit, J. M., Rol, P. K., Kistemaker, J.
Format: Article
Language:English
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Summary:The dependence of the sputtering yield upon the angle of incidence for copper single crystals by bombardment with 20-keV Ne+, Ar+, and Kr+ ions has been measured. The maxima and minima in this dependence, which have been found, can be correlated to a transparency in different directions of the first few lattice planes. An effective collision diameter deduced from the angular dependence of sputtering by Ar+ ion bombardment on a copper (100) single-crystal surface was found to be 0.39 Å. This value is 3 times larger than the effective collision diameter calculated from the hard sphere approximation for a Bohr potential, taking into account the thermal motion of the lattice particles.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.1729332