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Low-loss photonic crystal defect waveguides in InP
We have fabricated high-quality planar photonic crystal defect waveguides in InP/InGaAsP material. Using Fourier analysis of the Fabry-Pérot fringes obtained in transmission, we derive the propagation losses. Values as small as 1.8 dB/mm for waveguides consisting of three rows of missing holes (W3)...
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Published in: | Applied physics letters 2004-05, Vol.84 (18), p.3588-3590 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | We have fabricated high-quality planar photonic crystal defect waveguides in InP/InGaAsP material. Using Fourier analysis of the Fabry-Pérot fringes obtained in transmission, we derive the propagation losses. Values as small as 1.8 dB/mm for waveguides consisting of three rows of missing holes (W3) were measured. We believe that the reduction in losses is due to the high quality of etching carried out using a high beam voltage–current ratio regime of chemically assisted ion-beam etching. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.1737487 |