Tactile microsensor elements prepared from arrayed superelastic carbon microcoils

Superelastic carbon microcoils (SCMCs) with high elasticity and coiling chirality were prepared by the Ni-catalyzed pyrolysis of acetylene, and novel tactile microsensor elements using the SCMCs as the sensor material were prepared. The sensor elements with a very small size of 80×80×80μm3 showed a...

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Bibliographic Details
Published in:Applied physics letters 2005-08, Vol.87 (5)
Main Authors: Chen, Xiuqin, Yang, S., Hasegawa, M, Kawabe, K., Motojima, S.
Format: Article
Language:English
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Summary:Superelastic carbon microcoils (SCMCs) with high elasticity and coiling chirality were prepared by the Ni-catalyzed pyrolysis of acetylene, and novel tactile microsensor elements using the SCMCs as the sensor material were prepared. The sensor elements with a very small size of 80×80×80μm3 showed a very high sensitivity of 0.3mgf (1Pa). It was found that the SCMC arraying in the matrix and the placement method on the electrodes dramatically affected the sensing properties.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2006209