Electrorheological fluid-actuated flexible platform

The design, fabrication, and performance of an electrorheological (ER) fluid-actuated flexible platform integrated on a microfluidic chip are reported in this letter. The digitally regulated ER microvalves control the four diaphragms on which a platform is sustained. With electrical input signals, t...

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Bibliographic Details
Published in:Applied physics letters 2006-04, Vol.88 (17), p.173505-173505-3
Main Authors: Liu, Liyu, Niu, Xize, Wen, Weijia, Sheng, Ping
Format: Article
Language:English
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Summary:The design, fabrication, and performance of an electrorheological (ER) fluid-actuated flexible platform integrated on a microfluidic chip are reported in this letter. The digitally regulated ER microvalves control the four diaphragms on which a platform is sustained. With electrical input signals, the platform can perform vibrations at tunable frequencies as well as generate complex leveling modes. The flexible platform can potentially act as a microdamper when its inputs are generated from a sensor, in combination with a feedback control system.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2196847