Extreme ultraviolet broadband Mo ∕ Y multilayer analyzers

• Published in: Applied physics letters 2006-12, Vol.89 (24), p.241120-241120-3
• Main Authors: Wang, Zhanshan, Wang, Hongchang, Zhu, Jingtao, Xu, Yao, Zhang, Shumin, Li, Cunxia, Wang, Fengli, Zhang, Zhong, Wu, Yongrong, Cheng, Xinbin, Chen, Lingyan, Michette, Alan G., Pfauntsch, Slawka J., Powell, A. Keith, Schäfers, Franz, Gaupp, Andreas, MacDonald, Mike
• Format: Article
• Language: English
• ISSN: 0003-6951; 1077-3118
• DOI: 10.1063/1.2405874

Broadband extreme ultraviolet molybdenum/yttrium aperiodic multilayer analyzers were designed for polarization experiments in 8.5 - 11.7 nm wavelength range. The multilayer analyzers were made using direct current magnetron sputtering and characterized using the soft x-ray polarimeter at BESSY-II facility. Measured s reflectivities at the Brewster angle are 5.5% for a multilayer designed for 8.5 - 10.1 nm wavelength range and 6.1% for one designed for 9.1 - 11.7 nm . The multilayers also exhibit high polarization degree up to 98.79%. In addition, the multilayer was also measured over 38°-52° angular range at the fixed wavelength of 10.2 nm and the mean s reflectivity is 6.2%.