Reduction in feature size of two-photon polymerization using SCR500

Fabricated by femtosecond laser pulses at wavelength λ of 780 nm , the feature size of two-photon polymerization using SCR500 was reduced to λ ∕ 50 . Lines with sub- 25 - nm width were produced by controlling the incident laser power and the laser focus scan speed up to 700 μ m ∕ s . Based on repoly...

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Bibliographic Details
Published in:Applied physics letters 2007-02, Vol.90 (7), p.071106-071106-3
Main Authors: Tan, Dengfeng, Li, Yan, Qi, Fengjie, Yang, Hong, Gong, Qihuang, Dong, Xianzi, Duan, Xuanming
Format: Article
Language:English
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Summary:Fabricated by femtosecond laser pulses at wavelength λ of 780 nm , the feature size of two-photon polymerization using SCR500 was reduced to λ ∕ 50 . Lines with sub- 25 - nm width were produced by controlling the incident laser power and the laser focus scan speed up to 700 μ m ∕ s . Based on repolymerization between two structures close to each other, the feature size was further reduced to ∼ 15 nm , which demonstrated the potential for three-dimensional nanofabrication with high spatial resolution.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2535504