Highly sensitive ZnO nanowire ethanol sensor with Pd adsorption

The authors report the growth of high-density single crystalline ZnO nanowires on patterned Zn O : Ga ∕ Si O 2 ∕ Si templates, Pd adsorption on nanowire surfaces, and the fabrication of ZnO nanowire-based ethanol gas sensors. With Pd adsorption, it was found that measured sensitivities of the ethano...

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Bibliographic Details
Published in:Applied physics letters 2007-07, Vol.91 (5), p.053111-053111-3
Main Authors: Hsueh, Ting-Jen, Chang, Shoou-Jinn, Hsu, Cheng-Liang, Lin, Yan-Ru, Chen, I.-Cherng
Format: Article
Language:English
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Summary:The authors report the growth of high-density single crystalline ZnO nanowires on patterned Zn O : Ga ∕ Si O 2 ∕ Si templates, Pd adsorption on nanowire surfaces, and the fabrication of ZnO nanowire-based ethanol gas sensors. With Pd adsorption, it was found that measured sensitivities of the ethanol gas sensors increased from 18.5% to 44.5% at 170 ° C and increased from 36.0% to 61.5% at 230 ° C .
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2757605