Integration of In2O3 nanoparticle based ozone sensors with GaInN∕GaN light emitting diodes

There is a high demand for compact low-cost ozone sensors. It has been shown recently that In2O3 nanolayers can act as ozone sensitive films activated at room temperature by ultraviolet light. In the present work, the authors integrate ultrathin layers of In2O3 nanoparticles and a GaInN∕GaN based bl...

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Bibliographic Details
Published in:Applied physics letters 2007-09, Vol.91 (10)
Main Authors: Wang, Ch. Y., Cimalla, V., Kups, Th, Röhlig, C.-C., Stauden, Th, Ambacher, O., Kunzer, M., Passow, T., Schirmacher, W., Pletschen, W., Köhler, K., Wagner, J.
Format: Article
Language:English
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Summary:There is a high demand for compact low-cost ozone sensors. It has been shown recently that In2O3 nanolayers can act as ozone sensitive films activated at room temperature by ultraviolet light. In the present work, the authors integrate ultrathin layers of In2O3 nanoparticles and a GaInN∕GaN based blue light emitting diode (LED) on a single sensor chip. The integrated sensor was found to be sensitive to O3 concentrations as low as ∼40ppb. These results demonstrate that by integrating GaInN∕GaN based blue LEDs and metal oxide sensing layers back to back on a single chip, compact and robust gas sensors can be realized.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2779971