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Design and operating characteristics of new type cold cathode ion source
In this work, the design and performance of new type ion source are described. The discharge mechanism of the source is based on creating an arc discharge through a saddle electric field inside the discharge tube. The saddle electric field is created by immersing an annular anode inside the discharg...
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Published in: | Review of scientific instruments 2007-12, Vol.78 (12), p.123301-123301-4 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | In this work, the design and performance of new type ion source are described. The discharge mechanism of the source is based on creating an arc discharge through a saddle electric field inside the discharge tube. The saddle electric field is created by immersing an annular anode inside the discharge tube covered from the upper and lower ends with two flanges. These two flanges act as cathodes. The discharge tube is surrounded by a solenoid coil which produces an axial magnetic field (up to
400
G
) measured at the center of the source. Measurements have been performed to find out the influence of arc power, pressure, discharge voltage, magnetic field, and extracting voltage on the ion source properties. The source yields an argon ion current of
∼
0.6
mA
and electron current of
∼
4
mA
at normal operating conditions (extraction voltage
V
ex
=
7
kV
, pressure of
5.5
×
10
−
4
Torr
,
V
arc
=
400
V
,
I
arc
=
1
A
,
B
=
200
G
). It showed an energy spread of
20
eV
at a discharge voltage of
400
V
and an extraction voltage of
3
kV
. |
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ISSN: | 0034-6748 1089-7623 |
DOI: | 10.1063/1.2821236 |