Estimation of the Lyman-α line intensity in a lithium-based discharge-produced plasma source

Extreme ultraviolet (EUV) discharge-based lamps for EUV lithography need to generate extremely high power in the narrow spectrum band of 13.5±0.135 nm. A simplified time-dependent collisional-radiative model and radiative transfer solution were utilized to investigate the wavelength-integrated Lyman...

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Bibliographic Details
Published in:Journal of applied physics 2008-01, Vol.103 (1)
Main Authors: Masnavi, Majid, Nakajima, Mitsuo, Hotta, Eiki, Horioka, Kazuhiko
Format: Article
Language:English
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Summary:Extreme ultraviolet (EUV) discharge-based lamps for EUV lithography need to generate extremely high power in the narrow spectrum band of 13.5±0.135 nm. A simplified time-dependent collisional-radiative model and radiative transfer solution were utilized to investigate the wavelength-integrated Lyman-α line light outputs in a hydrogen-like lithium ion. The study reveals in particular that a steady-state or magnetically confined lithium plasma radiates in the desired spectrum band not less than 1 kW in 2π sr even at an ion density region as low as 1017 cm−3.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.2827477