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Ultrasmall radio frequency driven microhollow cathode discharge
We have operated 25 - 100 μ m diameter radio frequency microhollow cathode discharges stably, for many hours, in neon and in argon. Electrical and spectroscopic measurements were used to explore three possible electron heating modes and obtain detail regarding the electron energy distribution. Analy...
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Published in: | Applied physics letters 2008-07, Vol.93 (1), p.011501-011501-3 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | We have operated
25
-
100
μ
m
diameter radio frequency microhollow cathode discharges stably, for many hours, in neon and in argon. Electrical and spectroscopic measurements were used to explore three possible electron heating modes and obtain detail regarding the electron energy distribution. Analysis points to the possibility of pendular electron heating at low voltages. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.2956412 |