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Local droplet etching of nanoholes and rings on GaAs and AlGaAs surfaces
We study the formation of nanoholes and rings on GaAs and AlGaAs surfaces by local droplet etching (LDE) with gallium and indium. The nanohole properties are tuned by variation in etching temperature and time as well as by the etchant. Nanoholes fabricated by In LDE are larger and have an about ten...
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Published in: | Applied physics letters 2008-09, Vol.93 (12), p.123108-123108-3 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | We study the formation of nanoholes and rings on GaAs and AlGaAs surfaces by local droplet etching (LDE) with gallium and indium. The nanohole properties are tuned by variation in etching temperature and time as well as by the etchant. Nanoholes fabricated by In LDE are larger and have an about ten times lower density compared to Ga LDE, which allows the fabrication of nanoholes with ultralow density of less than
5
×
10
6
cm
−
2
. Furthermore, the nanohole borders are surrounded by distinct walls. The walls are crystallized from droplet material and serve as quantum rings with tunable size and band gap. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.2981517 |