Structural, dielectric, and insulating properties of barium strontium titanate thin films grown on various oriented LaAlO3 substrates

( Ba 0.6 Sr 0.4 ) TiO 3 (BST) thin films were deposited on (100) and (110) oriented LaAlO3 (LAO) single-crystal substrates by radio-frequency magnetron sputtering system, respectively. X-ray diffraction θ-2θ and Φ-scans results showed that the BST thin films grown on LaAlO3 (100) displayed (h00) pre...

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Bibliographic Details
Published in:Journal of applied physics 2009-02, Vol.105 (3)
Main Authors: Chen, Hongwei, Yang, Chuanren, Wang, Bo, Ji, Hong, Zhang, Jihua
Format: Article
Language:English
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Summary:( Ba 0.6 Sr 0.4 ) TiO 3 (BST) thin films were deposited on (100) and (110) oriented LaAlO3 (LAO) single-crystal substrates by radio-frequency magnetron sputtering system, respectively. X-ray diffraction θ-2θ and Φ-scans results showed that the BST thin films grown on LaAlO3 (100) displayed (h00) preferred orientation, while the films grown on LaAlO3 (110) indicated (110) preferred orientation. Atomic force microscope revealed that BST films grown on LAO (110) had smoother surface and smaller grain size than that BST films grown on LAO (100). Compared with BST films grown on LAO (100), the BST films grown on LAO (110) had higher tunability and better figure of merit. Additionally, the current-voltage (I-V) measurement indicated that the leakage current density of BST films grown on LAO (110) was obviously reduced compared to that of BST films grown on LAO (100).
ISSN:0021-8979
1089-7550
DOI:10.1063/1.3077267