Electronic cooling of a submicron-sized metallic beam

We demonstrate electronic cooling of a suspended AuPd island using superconductor- insulator-normal metal tunnel junctions. This was achieved by developing a simple fabrication method for reliably releasing narrow submicron-sized metal beams. The process is based on reactive ion etching and uses a c...

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Bibliographic Details
Published in:Applied physics letters 2009-02, Vol.94 (7), p.073101-073101-3
Main Authors: Muhonen, J. T., Niskanen, A. O., Meschke, M., Pashkin, Yu A., Tsai, J. S., Sainiemi, L., Franssila, S., Pekola, J. P.
Format: Article
Language:English
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Summary:We demonstrate electronic cooling of a suspended AuPd island using superconductor- insulator-normal metal tunnel junctions. This was achieved by developing a simple fabrication method for reliably releasing narrow submicron-sized metal beams. The process is based on reactive ion etching and uses a conducting substrate to avoid charge-up damage and is compatible with, e.g., conventional e-beam lithography, shadow-angle metal deposition, and oxide tunnel junctions. The devices function well and exhibit clear cooling, up to a factor of 2 at sub-Kelvin temperatures.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3080668