High- Q terahertz microcavities in silicon photonic crystal slabs

Photonic crystal cavities consisting of three holes missing along a principal axis in a triangular lattice of holes in a silicon slab were fabricated. Each cavity was built into a waveguide to form a Lorentzian filter. Two samples were constructed with lattice constants a = 80 and 76   μ m , with a...

Full description

Saved in:
Bibliographic Details
Published in:Applied physics letters 2009-04, Vol.94 (15), p.154104-154104-3
Main Authors: Yee, Cristo M., Sherwin, Mark S.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Photonic crystal cavities consisting of three holes missing along a principal axis in a triangular lattice of holes in a silicon slab were fabricated. Each cavity was built into a waveguide to form a Lorentzian filter. Two samples were constructed with lattice constants a = 80 and 76   μ m , with a radius r = 0.30 a in a 44   μ m thick high-resistivity silicon wafer. Transmission experiment show a single sharp resonance near 1 THz in each sample with quality factor Q as high as 1020. Contributions to the measured Q from cavity-waveguide coupling, radiative loss, and material loss are determined.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3118579