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Preparation of polished substrates of BaF2
The utilization of Pb1−xSnxTe epitaxial films in high-density forward-looking infrared (FLIR) arrays has been hampered thus far by cleavage steps in the substrates. We have developed a chemical-mechanical polishing technique for the (111) surface of BaF2 which leaves this substrate material single c...
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Published in: | Journal of applied physics 1976-01, Vol.47 (2), p.736-740 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The utilization of Pb1−xSnxTe epitaxial films in high-density forward-looking infrared (FLIR) arrays has been hampered thus far by cleavage steps in the substrates. We have developed a chemical-mechanical polishing technique for the (111) surface of BaF2 which leaves this substrate material single crystal and almost damage free. X-ray data on the polished BaF2 and the Pb0.8Sn0.2Te epitaxial film indicate single-crystal surfaces with very little damage. Furthermore, the electrical properties of the Pb0.8Sn0.2Te epitaxial film are sufficient for FLIR applications. |
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ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.322617 |