Preparation of c-axis oriented PbTiO3 thin films and their crystallographic, dielectric, and pyroelectric properties

Highly c-axis oriented and epitaxial PbTiO3 thin films were grown on MgO single crystals and epitaxial Pt film substrates by the rf-magnetron sputtering method. The films with a 98% c-axis orientation rate were obtained under low deposition rate (

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Bibliographic Details
Published in:Journal of applied physics 1986-07, Vol.60 (1), p.361-367
Main Authors: LIJIMA, K, TOMITA, Y, TAKAYAMA, R, UEDA, I
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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Description
Summary:Highly c-axis oriented and epitaxial PbTiO3 thin films were grown on MgO single crystals and epitaxial Pt film substrates by the rf-magnetron sputtering method. The films with a 98% c-axis orientation rate were obtained under low deposition rate (
ISSN:0021-8979
1089-7550
DOI:10.1063/1.337654