Large-signal time-domain modeling of low-pressure rf glow discharges

Large-signal time-domain modeling (simulation) of rf glow discharges is a very useful and potentially accurate tool for the study of low-pressure (50–500-mT) gaseous electronics at high frequencies. Unfortunately, the computational limitations imposed for stability, accuracy, and efficiency can ofte...

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Bibliographic Details
Published in:Journal of applied physics 1987, Vol.61 (1), p.81-89
Main Authors: BARNES, M. S, COLTER, T. J, ELTA, M. E
Format: Article
Language:English
Subjects:
Applied sciences
Electric discharges
Exact sciences and technology
Other techniques and industries
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
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Summary:Large-signal time-domain modeling (simulation) of rf glow discharges is a very useful and potentially accurate tool for the study of low-pressure (50–500-mT) gaseous electronics at high frequencies. Unfortunately, the computational limitations imposed for stability, accuracy, and efficiency can often hinder the production of useful, cost-effective results. This paper describes a self-consistent argon rf glow-discharge simulation at 13.56 MHz for equal- and unequal-area parallel-plate electrode geometries. Some of the numerical problems associated with this type of simulation are identified and the numerical methods used to overcome them are described. To illustrate the usefulness of this modeling scheme, the plasma potential and the cathode dc bias are examined as functions of electrode area ratio and rf power.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.338804