Spectroscopic and fast photographic studies of excimer laser polymer ablation

Spectroscopy and fast photography have been used to study the luminous plume produced by ablative etching of polyimide and polyethylene-terephthalate polymer films with the XeCl laser. The time dependence of the expansion for various environmental gas pressures has been studied in this way. The resu...

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Bibliographic Details
Published in:Journal of applied physics 1988-11, Vol.64 (9), p.4657-4663
Main Authors: DYER, P. E, SIDHU, J
Format: Article
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Physical properties
Polymer industry, paints, wood
Properties and testing
Radiation influence
Technology of polymers
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Summary:Spectroscopy and fast photography have been used to study the luminous plume produced by ablative etching of polyimide and polyethylene-terephthalate polymer films with the XeCl laser. The time dependence of the expansion for various environmental gas pressures has been studied in this way. The results show that at low pressures (
ISSN:0021-8979
1089-7550
DOI:10.1063/1.341247