Composition and deposition temperature dependence of the structure of oxidized thin-film amorphous Tb-Fe

• Published in: Journal of applied physics 1989-04, Vol.65 (7), p.2847-2851
• Main Authors: HELLMAN, F, NAKAHARA, S, FRANKENTHAL, R. P, VAN DOVER, R. B, SICONOLFI, D. J, GYORGY, E. M
• Format: Article
• Language: English
• Subjects: Analysing. Testing. Standards; Applied sciences; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Materials science; Measurement of properties and materials state; Metals, semimetals and alloys; Metals. Metallurgy; Nondestructive testing; Physics; Solid surfaces and solid-solid interfaces; Specific materials; Surface and interface dynamics and vibrations; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology
• ISSN: 0021-8979; 1089-7550
• DOI: 10.1063/1.342724

The microstructure of oxidized amorphous Tb-Fe alloy thin films prepared by magnetron cosputtering has been studied as a function of alloy composition and the substrate temperature at which the films were grown. Transmission electron microscopy and Auger electron spectroscopy with ion-sputter depth profiling were used to characterize the films. The composition of the alloy has no dramatic effect on the oxidation rate; it does, however, effect the microstructure of the α-Fe2O3 layer that forms on the alloy. Oxidized alloys originally containing more than 27 at. % Tb show an extremely fine-grained structure, with grain sizes on the order of 30 Å. Alloys containing less Tb developed large (1–2 μm) [001]-oriented single-crystal α-Fe2O3 grains amongst the fine-grained α-Fe2O3. For alloys with less then 18 at. % Tb, only the large grains remain. Samples grown at deposition temperatures ranging from 85 K to 400 °C show a similar structure after oxidation.