A Monte Carlo simulation of primary and secondary electron trajectories in a specimen

A new Monte Carlo calculation model is presented to simulate not only the primary electron behavior but also the secondary electron cascade in a specimen bombarded with an electron beam. Electrons having energy greater than 0.1 keV are treated as ‘‘fast electrons’’ and the previous single scattering...

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Bibliographic Details
Published in:Journal of applied physics 1989-05, Vol.65 (10), p.3991-3998
Main Author: KOTERA, M
Format: Article
Language:English
Subjects:
Analysing. Testing. Standards
Applied sciences
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Electron and ion emission by liquids and solids
impact phenomena
Electron impact: secondary emission
Exact sciences and technology
Impact phenomena (including electron spectra and sputtering)
Materials science
Measurement of properties and materials state
Metals, semimetals and alloys
Metals. Metallurgy
Nondestructive testing
Physics
Specific materials
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Description
Summary:A new Monte Carlo calculation model is presented to simulate not only the primary electron behavior but also the secondary electron cascade in a specimen bombarded with an electron beam. Electrons having energy greater than 0.1 keV are treated as ‘‘fast electrons’’ and the previous single scattering Monte Carlo model is adopted. Electrons having energy smaller than 0.1 keV are treated as ‘‘slow electrons’’ and the electron cascade Monte Carlo model is used. The calculated results for the energy distribution of secondary electrons, and primary electron energy dependence of the total secondary yield and the backscattering yield are in good agreement with experimental results.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.343341