Optical constants of graphene measured by spectroscopic ellipsometry

A mechanically exfoliated graphene flake ( ∼ 150 × 380   μ m 2 ) on a silicon wafer with 98 nm silicon dioxide on top was scanned with a spectroscopic ellipsometer with a focused spot ( ∼ 100 × 55   μ m 2 ) at an angle of 55°. The spectroscopic ellipsometric data were analyzed with an optical model...

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Bibliographic Details
Published in:Applied physics letters 2010-08, Vol.97 (9), p.091904-091904-3
Main Authors: Weber, J. W., Calado, V. E., van de Sanden, M. C. M.
Format: Article
Language:English
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Summary:A mechanically exfoliated graphene flake ( ∼ 150 × 380   μ m 2 ) on a silicon wafer with 98 nm silicon dioxide on top was scanned with a spectroscopic ellipsometer with a focused spot ( ∼ 100 × 55   μ m 2 ) at an angle of 55°. The spectroscopic ellipsometric data were analyzed with an optical model in which the optical constants were parameterized by B-splines. This parameterization is the key for the simultaneous accurate determination of the optical constants in the wavelength range 210-1000 nm and the thickness of graphene, which was found to be 3.4 Å.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3475393