ab-oriented YBa2Cu3O7 thin film grown on c-axis layer by radio frequency sputtering

YBa2Cu3O7 films can be grown on different substrates by the off-axis ac magnetron sputtering method. Films in the ab orientation tend to grow at a lower substrate temperature than c-axis films. However, as the temperature is lowered, all the substrates we have tested, except for SrTiO3, form amorpho...

Full description

Saved in:
Bibliographic Details
Published in:Journal of applied physics 1992-12, Vol.72 (11), p.5337-5340
Main Authors: SIJIA WU, NG, K.-W, ROBERTSON, J. D, JACOB, R. J
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Solid surfaces and solid-solid interfaces
Surface and interface dynamics and vibrations
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:YBa2Cu3O7 films can be grown on different substrates by the off-axis ac magnetron sputtering method. Films in the ab orientation tend to grow at a lower substrate temperature than c-axis films. However, as the temperature is lowered, all the substrates we have tested, except for SrTiO3, form amorphous phases that degrade the quality of the films being made. In this manuscript it is shown that if a thin layer of c-axis film is deposited on the substrate first, then it effectively reduces the formation of the amorphous phases and improves the film quality significantly.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.351969