Electromagnetic particle simulation of electron cyclotron resonance microwave discharge

We present a numerical model to study the electron cyclotron resonance (ECR) microwave discharge using a one-dimensional electromagnetic particle-in-cell Monte Carlo collision method [C. K. Birdsall, IEEE Trans. Plasma Sci. 19, 65 (1991)]. In our model, the electromagnetic wave is polarized circular...

Full description

Saved in:
Bibliographic Details
Published in:Journal of applied physics 1993-05, Vol.73 (9), p.4205-4211
Main Authors: Koh, Wook Hee, Choi, Nak Heon, Choi, Duk In, Oh, Yong Ho
Format: Article
Language:English
Subjects:
Electric discharges
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We present a numerical model to study the electron cyclotron resonance (ECR) microwave discharge using a one-dimensional electromagnetic particle-in-cell Monte Carlo collision method [C. K. Birdsall, IEEE Trans. Plasma Sci. 19, 65 (1991)]. In our model, the electromagnetic wave is polarized circularly and propagates along an external static magnetic field and elastic, excitational, and ionizing electron-neutral collisions and elastic and charge exchange ion-neutral collisions are included. The discharge for helium gas is simulated and the simulation results explain well the physical properties of the ECR discharge which include the energy absorption of electrons through ECR coupling, the propagation of microwave, the transports of the charged particles, and the effect of divergent external magnetic field.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.352825