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Magnetic tunneling junction based magnetic field sensors: Role of shape anisotropy versus free layer thickness
Al 2 O 3 - and MgO-based magnetic tunnel junction (MTJ) sensors were designed and fabricated using microfabrication techniques. This study revealed that in the case of Al 2 O 3 -based sensors, the shape anisotropy in the free NiFe electrode resulted in a linear and hysteresis-free tunneling magnetor...
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Published in: | Journal of applied physics 2011-04, Vol.109 (7), p.07C731-07C731-3 |
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Main Authors: | , , , , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Al
2
O
3
- and MgO-based magnetic tunnel junction (MTJ) sensors were designed and fabricated using microfabrication techniques. This study revealed that in the case of Al
2
O
3
-based sensors, the shape anisotropy in the free NiFe electrode resulted in a linear and hysteresis-free tunneling magnetoresistance (TMR) curve. These sensors exhibited TMR values between 27% and 30% and sensitivity up to 0.4%/Oe over a magnetic field range of −40 to 40 Oe. In the case of CoFeB/MgO/CoFeB MTJ sensors, shape anisotropy alone was not sufficient to achieve a linear and hysteresis-free MR response. A superparamagnetic free layer was used to achieve the desired sensor response. MgO-based sensors had about 90% TMR and 1.1%/Oe sensitivity over the same field range as Al
2
O
3
-based MTJs. |
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ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.3563096 |