Determination of AlAs optical constants by variable angle spectroscopic ellipsometry and a multisample analysis

Using variable angle spectroscopic ellipsometry, optical constants for AlAs (1.4–5.0 eV) are presented which are simultaneously compatible with measured data from four different samples. The below-gap index values are compatible with published prism measured values. The second derivative spectrum ar...

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Bibliographic Details
Published in:Journal of applied physics 1995-05, Vol.77 (9), p.4677-4687
Main Authors: Herzinger, C. M., Yao, H., Snyder, P. G., Celii, F. G., Kao, Y.-C., Johs, B., Woollam, J. A.
Format: Article
Language:English
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Summary:Using variable angle spectroscopic ellipsometry, optical constants for AlAs (1.4–5.0 eV) are presented which are simultaneously compatible with measured data from four different samples. The below-gap index values are compatible with published prism measured values. The second derivative spectrum are compatible with published values above the direct band gap. The AlAs spectra is Kramers–Kronig self-consistent over the measured range and is compatible with published values from 0.6 to 1.4 eV. The optical constants for thin (
ISSN:0021-8979
1089-7550
DOI:10.1063/1.359435