Two-dimensional distributions of C2, CH, and OH in a diamond depositing oxyacetylene flame measured by laser induced fluorescence

Two-dimensional laser induced fluorescence measurements are applied to the chemical vapor deposition of diamond by an oxyacetylene flame. The fluorescence distributions of C2, CH, and OH are measured for various deposition conditions. The influence of the temperature of the molybdenum substrate and...

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Bibliographic Details
Published in:Journal of applied physics 1995-08, Vol.78 (3), p.2086-2096
Main Authors: Klein-Douwel, R. J. H., Spaanjaars, J. J. L., ter Meulen, J. J.
Format: Article
Language:English
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Summary:Two-dimensional laser induced fluorescence measurements are applied to the chemical vapor deposition of diamond by an oxyacetylene flame. The fluorescence distributions of C2, CH, and OH are measured for various deposition conditions. The influence of the temperature of the molybdenum substrate and the distance between the substrate and the flame front on the two-dimensional distributions and on the quality and morphology of the deposited diamond is investigated. A relation is observed between the C2 distribution in the flame and the local growth rate and quality of the diamond layer, therefore C2 is thought to be an important species for diamond growth. The exact role of CH as a growth species is less clear; OH seems to be of minor importance. All measurements are performed during diamond deposition.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.360186