High-reflectivity, high- Q micromechanical membranes via guided resonances for enhanced optomechanical coupling

Using Fano-type guided resonances (GRs) in photonic crystal (PhC) slab structures, we numerically and experimentally demonstrate optical reflectivity enhancement of high- Q SiN x membrane-type resonators used in membrane-in-the-middle optomechanical (OM) systems. Normal-incidence transmission and me...

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Bibliographic Details
Published in:Applied physics letters 2012-01, Vol.100 (2), p.021110-021110-3
Main Authors: Bui, Catvu H., Zheng, Jiangjun, Hoch, S. W., Lee, Lennon Y. T., Harris, J. G. E., Wei Wong, Chee
Format: Article
Language:English
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Summary:Using Fano-type guided resonances (GRs) in photonic crystal (PhC) slab structures, we numerically and experimentally demonstrate optical reflectivity enhancement of high- Q SiN x membrane-type resonators used in membrane-in-the-middle optomechanical (OM) systems. Normal-incidence transmission and mechanical ringdown measurements of 50-nm-thick PhC membranes demonstrate GRs near 1064nm, leading to a ∼4×increase in reflectivity while preserving high mechanical Q factors of up to ∼5×10 6 . The results would allow improvement of membrane-in-the-middle OM systems by virtue of increased OM coupling, presenting a path towards ground state cooling of such a membrane and observations of related quantum effects.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3658731