Tin doped indium oxide thin films: Electrical properties

Tin doped indium oxide (ITO) films are highly transparent in the visible region, exhibiting high reflectance in the infrared region, and having nearly metallic conductivity. Owing to this unusual combination of electrical and optical properties, this material is widely applied in optoelectronic devi...

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Bibliographic Details
Published in:Journal of applied physics 1998-03, Vol.83 (5), p.2631-2645
Main Authors: Bel Hadj Tahar, Radhouane, Ban, Takayuki, Ohya, Yutaka, Takahashi, Yasutaka
Format: Article
Language:English
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Summary:Tin doped indium oxide (ITO) films are highly transparent in the visible region, exhibiting high reflectance in the infrared region, and having nearly metallic conductivity. Owing to this unusual combination of electrical and optical properties, this material is widely applied in optoelectronic devices. The association of these properties in a single material explains the vast domain of its applicability and the diverse production methods which have emerged. Although the different properties of tin doped indium oxide in the film form are interdependent, this article mainly focuses on the electrical aspects. Detailed description of the conduction mechanism and the main parameters that control the conductivity is presented. On account of the large varieties and differences in the fabrication techniques, the electrical properties of ITO films are discussed and compared within each technique.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.367025