Atomic structure and phase transitions in disordered Ti1−xGaxN thin films grown by pulsed laser deposition

We report here the growth by pulsed laser deposition and characterization of metastable disordered Ti1−xGaxN alloy thin films on Al2O3(0001) substrates. X-ray diffraction and x-ray-absorption fine-structure analyses showed that the films contained a single rocksaltlike atomic structure for 0⩽ x

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Bibliographic Details
Published in:Journal of applied physics 1998-06, Vol.83 (12), p.7613-7617
Main Authors: Ren, Jian Z., Rose, Garry A., Williams, R. Stanley, Booth, Corwin H., Shuh, David K.
Format: Article
Language:English
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Summary:We report here the growth by pulsed laser deposition and characterization of metastable disordered Ti1−xGaxN alloy thin films on Al2O3(0001) substrates. X-ray diffraction and x-ray-absorption fine-structure analyses showed that the films contained a single rocksaltlike atomic structure for 0⩽ x
ISSN:0021-8979
1089-7550
DOI:10.1063/1.367877