Mechanical properties of Ti-containing and W-containing diamond-like carbon coatings

Ti-containing and W-containing diamond-like hydrocarbon coatings have been synthesized by glow discharge reactive magnetron sputter deposition in an Ar/CH4 mixture. it is shown that these metal-containing hydrocarbon coatings consist of nanocrystalline TiC and WC embedded in an amorphous hydrocarbon...

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Bibliographic Details
Published in:Journal of applied physics 1998-10, Vol.84 (8), p.4314-4321
Main Authors: Meng, W. J., Gillispie, B. A.
Format: Article
Language:English
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Summary:Ti-containing and W-containing diamond-like hydrocarbon coatings have been synthesized by glow discharge reactive magnetron sputter deposition in an Ar/CH4 mixture. it is shown that these metal-containing hydrocarbon coatings consist of nanocrystalline TiC and WC embedded in an amorphous hydrocarbon matrix and are thin-film nanocomposite materials. The elastic modulus and hardness of these nanocomposites exhibit systematic dependence on their composition, while the ratio of hardness to modulus remains approximately a constant. It is also shown that the elastic modulus and hardness of these nanocomposites are within macromechanical bounds for two-phase composite materials.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.368650