Populations of excited atomic states along argon surface-wave plasma columns at low and intermediate pressures

The axial distributions of the electrons and 3p54s and 3p54p excited atoms in argon plasma columns sustained by traveling electromagnetic waves have been studied both experimentally and theoretically in the gas pressure range of 0.2–2.8 Torr. Various diagnostic methods (surface-wave interferometry,...

Full description

Saved in:
Bibliographic Details
Published in:Journal of applied physics 2000-06, Vol.87 (11), p.7652-7659
Main Authors: Lao, C., Gamero, A., Sola, A., Petrova, Ts, Benova, E., Petrov, G. M., Zhelyazkov, I.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The axial distributions of the electrons and 3p54s and 3p54p excited atoms in argon plasma columns sustained by traveling electromagnetic waves have been studied both experimentally and theoretically in the gas pressure range of 0.2–2.8 Torr. Various diagnostic methods (surface-wave interferometry, emission and absorption spectroscopy) have been used in data gathering. The theoretical model includes a self-consistent solution to the electron Boltzmann equation, electron energy balance equation, a set of balance equations for excited atoms and charged particles, the gas thermal balance equation, the wave dispersion relation, and the wave energy balance equation. The agreement between experimental data and theoretical results is very good.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.373436