Laser sputtering of highly oriented pyrolytic graphite at 248 nm

The interaction of excimer laser pulses with a highly oriented pyrolytic graphite (HOPG) target has been studied. HOPG, a close approximation to single crystal graphite, was irradiated along a freshly cleaved basal plane in vacuum by pulses from a KrF excimer laser. The energy fluence was varied bet...

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Bibliographic Details
Published in:The Journal of chemical physics 1995-01, Vol.102 (2), p.726-743
Main Author: Krajnovich, Douglas J.
Format: Article
Language:English
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Summary:The interaction of excimer laser pulses with a highly oriented pyrolytic graphite (HOPG) target has been studied. HOPG, a close approximation to single crystal graphite, was irradiated along a freshly cleaved basal plane in vacuum by pulses from a KrF excimer laser. The energy fluence was varied between 300–700 mJ/cm2, resulting in material removal rates of
ISSN:0021-9606
1089-7690
DOI:10.1063/1.469186