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Comparison between bulk and nanoscale copper-silicide: Experimental studies on the crystallography, chemical, and oxidation of copper-silicide nanowires on Si(001)

Self-assembled copper-silicide (Cu-Si) nanowires were prepared by the evaporation of Cu onto Si(001) under high vacuum conditions. The Cu-Si nanowires were studied in situ by scanning electron microscopy. Crystallographic, structural, and chemical properties of the nanowires were investigated by tra...

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Bibliographic Details
Published in:Journal of applied physics 2012-05, Vol.111 (10), p.104301-104301-7
Main Authors: Ng, P. K., Fisher, B., Low, K. B., Joshi-Imre, A., Bode, M., Lilley, C. M.
Format: Article
Language:English
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Summary:Self-assembled copper-silicide (Cu-Si) nanowires were prepared by the evaporation of Cu onto Si(001) under high vacuum conditions. The Cu-Si nanowires were studied in situ by scanning electron microscopy. Crystallographic, structural, and chemical properties of the nanowires were investigated by transmission electron microscopy at cross-sections of these nanowires fabricated by focused ion beam. In addition, chemical of nanowires were also studied by scanning transmission electron microscopy. The morphology of Cu-Si nanowires due to oxidation at ambient conditions was investigated as well. Experimental results obtained from the Cu-Si nanowires were compared to bulk data reported previously by other authors.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.4712536