Piezoresistive strain sensing using carbon nanotube forests suspended by Parylene-C membranes

We present a strain gauge that uses a carbon nanotube (CNT) forest, partially embedded in a Parylene-C membrane, as a piezoresistor. The device exhibits high sensitivity with a gauge factor of 4.52 or higher for strains up to ∼1.5%, offering much higher sensitivity in the strain range than those rep...

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Bibliographic Details
Published in:Applied physics letters 2012-05, Vol.100 (21), p.213510-213510-3
Main Authors: Bsoul, Anas, Sultan Mohamed Ali, Mohamed, Nojeh, Alireza, Takahata, Kenichi
Format: Article
Language:English
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Summary:We present a strain gauge that uses a carbon nanotube (CNT) forest, partially embedded in a Parylene-C membrane, as a piezoresistor. The device exhibits high sensitivity with a gauge factor of 4.52 or higher for strains up to ∼1.5%, offering much higher sensitivity in the strain range than those reported for other types of CNT-forest/polymer composite piezoresistors. The gauge also shows a linear response to bending strains generated by forces applied perpendicularly to the membrane with a 55-ppm/mN sensitivity. These findings suggest promising characteristics for a variety of sensing applications of the CNT-forest/Parylene film.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4721460