Development of piezoelectric microcantilever flow sensor with wind-driven energy harvesting capability

We have developed a piezoelectric (PZT) microcantilever as an air flow sensor and a wind-driven energy harvester for a self-sustained flow-sensing microsystem. A flow sensing sensitivity of 0.9mV/(m/s) is obtained. The output voltage and optimized power regarding to the load resistance of 100kΩ are...

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Bibliographic Details
Published in:Applied physics letters 2012-05, Vol.100 (22), p.223905-223905-3
Main Authors: Liu, Huicong, Zhang, Songsong, Kathiresan, Ramprakash, Kobayashi, Takeshi, Lee, Chengkuo
Format: Article
Language:English
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Summary:We have developed a piezoelectric (PZT) microcantilever as an air flow sensor and a wind-driven energy harvester for a self-sustained flow-sensing microsystem. A flow sensing sensitivity of 0.9mV/(m/s) is obtained. The output voltage and optimized power regarding to the load resistance of 100kΩ are measured as 18.1mV and 3.3nW at flow velocity of 15.6m/s, respectively. The corresponding power density is as large as 0.36mW/cm 3 . The experimental results have elucidated the smart function of using PZT microcantilevers as flow-sensors and wind-driven energy harvesters simultaneously.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4723846