Electrically integrated SU-8 clamped graphene drum resonators for strain engineering

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Bibliographic Details
Published in:Applied physics letters 2013-04, Vol.102 (15), p.153101
Main Authors: Lee, Sunwoo, Chen, Changyao, Deshpande, Vikram V., Lee, Gwan-Hyoung, Lee, Ilkyu, Lekas, Michael, Gondarenko, Alexander, Yu, Young-Jun, Shepard, Kenneth, Kim, Philip, Hone, James
Format: Article
Language:English
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ISSN:0003-6951
1077-3118
DOI:10.1063/1.4793302