AlN/single crystalline diamond piezoelectric structure as a high overtone bulk acoustic resonator

First, the Al/AlN/Al/Cr/diamond single crystal piezoelectric layered structure has been developed, and its properties have been investigated up to 8 GHz. The peculiarities associated with the influence of piezoelectric film on the Q factor of high overtones of substrate have been pointed out. High Q...

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Bibliographic Details
Published in:Applied physics letters 2013-03, Vol.102 (11)
Main Authors: Sorokin, B. P., Kvashnin, G. M., Volkov, A. P., Bormashov, V. S., Aksenenkov, V. V., Kuznetsov, M. S., Gordeev, G. I., Telichko, A. V.
Format: Article
Language:English
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Summary:First, the Al/AlN/Al/Cr/diamond single crystal piezoelectric layered structure has been developed, and its properties have been investigated up to 8 GHz. The peculiarities associated with the influence of piezoelectric film on the Q factor of high overtones of substrate have been pointed out. High Q ∼ 104 has been found at 6–7 GHz band.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4798333