Re-poling process for piezoelectric-based multilayer ceramic capacitors force sensor

This study presents an industrial-grade piezoelectric-based multilayer ceramic capacitors (MLCCs) force sensor. In order to increase the sensitivity and reduce the variation of different MLCCs, a simple re-poling process is adopted by applying an external electric field at the Curie temperature of M...

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Bibliographic Details
Published in:Applied physics letters 2013-04, Vol.102 (14)
Main Authors: Lin, Keng-Ren, Chang, Chih-Han, Chiang, Cheng-Hung, Lin, Che-Hsin
Format: Article
Language:English
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Summary:This study presents an industrial-grade piezoelectric-based multilayer ceramic capacitors (MLCCs) force sensor. In order to increase the sensitivity and reduce the variation of different MLCCs, a simple re-poling process is adopted by applying an external electric field at the Curie temperature of MLCCs. Results indicate that the re-poling treatment improved up to 100-fold for the force detection sensitivity and reduced the variation for the output force response by 10-fold in comparison with the MLCC sensors without re-poling.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4801499