Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al 2 O 3 dielectric

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Bibliographic Details
Published in:Applied physics letters 2013-04, Vol.102 (17), p.173501
Main Authors: Kozen, Alexander C., Schroeder, Marshall A., Osborn, Kevin D., Lobb, C. J., Rubloff, Gary W.
Format: Article
Language:English
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ISSN:0003-6951
1077-3118
DOI:10.1063/1.4801979