Tapered silicon nanowires for enhanced nanomechanical sensing

We investigate the effect of controllably induced tapering on the resonant vibrations and sensing performance of silicon nanowires. Simple analytical expressions for the resonance frequencies of the first two flexural modes as a function of the tapering degree are presented. Experimental measurement...

Full description

Saved in:
Bibliographic Details
Published in:Applied physics letters 2013-07, Vol.103 (3)
Main Authors: Malvar, O., Gil-Santos, E., Ruz, J. J., Ramos, D., Pini, V., Fernandez-Regulez, M., Calleja, M., Tamayo, J., San Paulo, A.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We investigate the effect of controllably induced tapering on the resonant vibrations and sensing performance of silicon nanowires. Simple analytical expressions for the resonance frequencies of the first two flexural modes as a function of the tapering degree are presented. Experimental measurements of the resonance frequencies of singly clamped nanowires are compared with the theory. Our model is valid for any nanostructure with tapered geometry, and it predicts a reduction beyond two orders of magnitude of the mass detection limit for conical resonators as compared to uniform beams with the same length and diameter at the clamp.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4813819