The density of states of graphene underneath a metal electrode and its correlation with the contact resistivity

The density of states (DOS) of graphene underneath a metal is estimated through a quantum capacitance measurement of the metal/graphene/SiO2/n+-Si contact structure fabricated by a resist-free metal deposition process. Graphene underneath Au maintains a linear DOS–energy relationship except near the...

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Bibliographic Details
Published in:Applied physics letters 2013-07, Vol.103 (3)
Main Authors: Ifuku, Ryota, Nagashio, Kosuke, Nishimura, Tomonori, Toriumi, Akira
Format: Article
Language:English
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Summary:The density of states (DOS) of graphene underneath a metal is estimated through a quantum capacitance measurement of the metal/graphene/SiO2/n+-Si contact structure fabricated by a resist-free metal deposition process. Graphene underneath Au maintains a linear DOS–energy relationship except near the Dirac point, whereas the DOS of graphene underneath Ni is broken and largely enhanced around the Dirac point, resulting in only a slight modulation of the Fermi energy. Moreover, the DOS of graphene in the contact structure is correlated with the contact resistivity measured using devices fabricated by the resist-free process.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4815990