Mechanisms of growth and defect properties of epitaxial SiC

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Bibliographic Details
Published in:Applied physics reviews 2014-09, Vol.1 (3), p.31301
Main Authors: La Via, F., Camarda, M., La Magna, A.
Format: Article
Language:English
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ISSN:1931-9401
1931-9401
DOI:10.1063/1.4890974