Thermometry of a high temperature high speed micro heater

A high temperature high-speed tungsten micro heater was fabricated and tested for application in phase change switches to indirectly heat and transform phase change material. Time domain transmissometry was used to measure heater temperature transients for given electrical inputs. Finite element mod...

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Bibliographic Details
Published in:Review of scientific instruments 2016-02, Vol.87 (2), p.024904-024904
Main Authors: Xu, M., Slovin, G., Paramesh, J., Schlesinger, T. E., Bain, J. A.
Format: Article
Language:English
Subjects:
Computer simulation
Finite element method
High temperature
Phase change materials
Scientific apparatus & instruments
Switches
Thermometry
Time constant
Tungsten
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Summary:A high temperature high-speed tungsten micro heater was fabricated and tested for application in phase change switches to indirectly heat and transform phase change material. Time domain transmissometry was used to measure heater temperature transients for given electrical inputs. Finite element modeling results on heater temperature transients show a good consistency between experiments and simulations with 0.2% mismatch in the best case and 13.1% in the worst case. The heater described in this work can reliably reach 1664 K at a rate of 1.67 × 1010 K/s and quench to room temperature with a thermal RC time constant (time for T to fall by a factor of e) of less than 40 ns.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.4942249