Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon

In this paper, we present new insight in the degradation and subsequent recovery of charge carrier lifetime upon light soaking at 75 °C observed in float-zone silicon wafers. Variations of doping type, dielectric passivation schemes and thermal treatments after layer deposition were performed. The d...

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Bibliographic Details
Published in:Journal of applied physics 2017-05, Vol.121 (18)
Main Authors: Niewelt, T., Selinger, M., Grant, N. E., Kwapil, W., Murphy, J. D., Schubert, M. C.
Format: Article
Language:English
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Summary:In this paper, we present new insight in the degradation and subsequent recovery of charge carrier lifetime upon light soaking at 75 °C observed in float-zone silicon wafers. Variations of doping type, dielectric passivation schemes and thermal treatments after layer deposition were performed. The degradation was only observed for p-type float-zone silicon wafers passivated with passivation schemes involving silicon nitride layers. An influence of thermal treatments after deposition was found. N-type wafers did not degrade independent of their passivation scheme. Room temperature re-passivation experiments showed the degradation to affect the wafer bulk, and photoluminescence studies demonstrated fine lateral striations of effective lifetime. We conclude that the degradation is caused by bulk defects that might be related to hydrogen complexes.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.4983024