A compact electron cyclotron resonance negative hydrogen ion source for evaluation of plasma electrode materials

A compact ion source that produces hydrogen plasma with an electron cyclotron resonance (ECR) configuration combined with a 2-stage extraction system with a single aperture of 6 mm diameter has been designed and built to study the performance of different materials as the plasma electrode (PE) of a...

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Bibliographic Details
Published in:Review of scientific instruments 2020-01, Vol.91 (1), p.013508-013508
Main Authors: Eguchi, Takayuki, Sasao, Mamiko, Shimabukuro, Yuji, Ikemoto, Fumiya, Kisaki, Masashi, Nakano, Haruhisa, Tsumori, Katsuyoshi, Wada, Motoi
Format: Article
Language:English
Subjects:
Aluminum
Apertures
Cyclotron resonance
Electrode materials
Electrodes
Electron cyclotron resonance
Hydrogen ions
Hydrogen plasma
Ion sources
Ions
Plasma
Scientific apparatus & instruments
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Summary:A compact ion source that produces hydrogen plasma with an electron cyclotron resonance (ECR) configuration combined with a 2-stage extraction system with a single aperture of 6 mm diameter has been designed and built to study the performance of different materials as the plasma electrode (PE) of a negative hydrogen ion source. The source has the capability to electrically bias the PE with respect to the ECR plasma. The first experiment with low ECR power input (less than 40 W) was carried out. The PE of the C12A7 electride showed the largest H− current among aluminum, molybdenum, and the C12A7 electride.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.5128610