Refractive-index-adjustable SiO2-Ta2O5 films for integrated optical circuits

This report is about the preparation and the optical transmission loss of rf-sputtered SiO2-Ta2O5 films that are suitable for use as transmission media in integrated optical circuits. It is shown that the films, which can be produced with a refractive-index range from 1.46 to 2.08 at 6328 Å waveleng...

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Bibliographic Details
Published in:Applied physics letters 1978-05, Vol.32 (10), p.666-668
Main Authors: Terui, Hiroshi, Kobayashi, Morio
Format: Article
Language:English
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Summary:This report is about the preparation and the optical transmission loss of rf-sputtered SiO2-Ta2O5 films that are suitable for use as transmission media in integrated optical circuits. It is shown that the films, which can be produced with a refractive-index range from 1.46 to 2.08 at 6328 Å wavelength by suitably selecting the ratio of the target constituents, exhibit a low optical transmission loss of less than 0.8 dB/cm for the TE0 mode.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.89848