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Mechanism of the SIMS matrix effect
Quantization of ion microprobe mass spectrometric analyses has been complicated by the variation in the ion yield of an element contained in different matrices. This work demonstrates that, for O− and Cs+ bombardment, these ion-yield variations are solely attributable to variations in the matrix spu...
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Published in: | Applied physics letters 1978-11, Vol.33 (9), p.832-835 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Quantization of ion microprobe mass spectrometric analyses has been complicated by the variation in the ion yield of an element contained in different matrices. This work demonstrates that, for O− and Cs+ bombardment, these ion-yield variations are solely attributable to variations in the matrix sputtering yield. It is argued that the matrix sputtering yield determines the near-surface concentration of the ion-yield-enhancing species O and Cs. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.90546 |